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- gwdlthermo@gwdl.com
The Double-layer CVD Sliding Horizontal Tube Electric Furnace offers precise temperature control, high efficiency, and advanced CVD processing for semiconductor and material science applications
sequence Number | name | Specifications | Material | quantity | Remark |
| 1 | 130 Furnace Assembly | 3 Temperature Zone / Maximum Temperature 1100℃ Each temperature zone is 300mm long / No interlayer. | Aluminum silicate | 2 sets | Compatible with 130mm outer diameter quartz tube Add a 30mm diameter furnace plugs at both ends of the bore |
| 3 | 130 Preheating Furnace Assembly | 1. Temperature Zone/ Preheating Furnace Temperature Zone Length 100mm, temperature 300-400℃ | Aluminum silicate | 2 sets | Compatible with 130mm outer diameter quartz tube Add a 30mm diameter furnace plugs at both ends of the bore |
| 3 | 130 Furnace Shell Components | Compatible with 130mm outer diameter quartz tube | Q235 | 2 sets | Sheet metal processing Powder coated 9016 traffic white |
| 4 | 130 Preheat Furnace shell assembly | Compatible with 130mm outer diameter quartz tube | Q235 | 2 sets | Sheet metal processing Powder coated 9016 traffic white |
| 5 | Quartz tube | Outer diameter Ø130mm | quartz | 2 roots | Estimated length: 3000mm |
| 6 | 130 Water Cooling Flange assembly | Compatible with 130mm outer diameter quartz tube | SUS 304 | 4 sets | |
| 7 | 30 Flange Assembly | Compatible with 30mm outer diameter quartz tube | SUS 304 | 4 sets |
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sequence Number | name | Specifications | Material | quantity | Remark |
| 1 | 130 Furnace Assembly | 3 Temperature Zone / Maximum Temperature 1100℃ Each temperature zone is 300mm long / No interlayer. | Aluminum silicate | 2 sets | Compatible with 130mm outer diameter quartz tube Add a 30mm diameter furnace plugs at both ends of the bore |
| 3 | 130 Preheating Furnace Assembly | 1. Temperature Zone/ Preheating Furnace Temperature Zone Length 100mm, temperature 300-400℃ | Aluminum silicate | 2 sets | Compatible with 130mm outer diameter quartz tube Add a 30mm diameter furnace plugs at both ends of the bore |
| 3 | 130 Furnace Shell Components | Compatible with 130mm outer diameter quartz tube | Q235 | 2 sets | Sheet metal processing Powder coated 9016 traffic white |
| 4 | 130 Preheat Furnace shell assembly | Compatible with 130mm outer diameter quartz tube | Q235 | 2 sets | Sheet metal processing Powder coated 9016 traffic white |
| 5 | Quartz tube | Outer diameter Ø130mm | quartz | 2 roots | Estimated length: 3000mm |
| 6 | 130 Water Cooling Flange assembly | Compatible with 130mm outer diameter quartz tube | SUS 304 | 4 sets | |
| 7 | 30 Flange Assembly | Compatible with 30mm outer diameter quartz tube | SUS 304 | 4 sets |
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